239000003518 caustics Substances 0.000 claims abstract description 15.Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.) Filing date Publication date Application filed by Carl Zeiss Industrielle Messtechnik GmbH filed Critical Carl Zeiss Industrielle Messtechnik GmbH Priority to DE102014205705.1A priority Critical patent/DE102014205705B4/en Priority to PCT/EP2015/055658 priority patent/WO2015144518A1/en Publication of DE102014205705A1 publication Critical patent/DE102014205705A1/en Priority to US15/277,254 priority patent/US9846026B2/en Application granted granted Critical Publication of DE102014205705B4 publication Critical patent/DE102014205705B4/en Status Active legal-status Critical Current Anticipated expiration legal-status Critical Links Original Assignee Carl Zeiss Industrielle Messtechnik GmbH Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.) ( en Inventor Nils Haverkamp Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.) Active Application number DE102014205705.1A Other languages German ( de)
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